Glovebox

To pursue our interest in developing novel heterostructures and low dimensional materials we are developing a “Cleanroom in a Glovebox”. Inside the inert atmosphere on the right side, materials can be mechanically bonded, exfoliated, and transferred to form 2D atomic crystal heterostructures. In addition in the glovebox on the right, we can perform various optical microscopy experiments and scanning probe measurements. Once ready, materials are transferred to the middle box where we can spin coat, write patterns with a maskless lithography system, perform plasma etching/de-scumming, and ultimately lift-off. The very left hand box includes a physical vapor deposition system where materials can be deposited and substrates cleaned.